Atomic Layer Deposition: An Overview Journal Article

Overview

CU Boulder Authors

• George, Steven

publication date

• January 1, 2010

has restriction

• closed

Date in CU Experts

• September 6, 2013 4:38 AM

Full Author List

• George SM

author count

• 1

citation count

• 4386

published in

• Chemical Reviews  Journal

Other Profiles

International Standard Serial Number (ISSN)

• 0009-2665

Electronic International Standard Serial Number (EISSN)

• 1520-6890

Digital Object Identifier (DOI)

• https://doi.org/10.1021/cr900056b

Additional Document Info

start page

• 111

end page

• 131

volume

• 110

issue

• 1