Importance of Trimethylaluminum Diffusion in Three-Step ABC Molecular Layer Deposition Using Trimethylaluminum, Ethanolamine, and Maleic Anhydride Journal Article uri icon

Overview

publication date

  • December 21, 2010

Date in CU Experts

  • September 6, 2013 4:38 AM

Full Author List

  • Seghete D; Hall RA; Yoon B; George SM

author count

  • 4

citation count

  • 51

Other Profiles

International Standard Serial Number (ISSN)

  • 0743-7463

Additional Document Info

start page

  • 19045

end page

  • 19051

volume

  • 26

issue

  • 24