Microstructure and properties of ultrathin amorphous silicon nitride protective coating Journal Article uri icon

Overview

publication date

  • November 1, 2003

has restriction

  • green

Date in CU Experts

  • November 5, 2020 2:39 AM

Full Author List

  • Yen BK; White RL; Waltman RJ; Dai Q; Miller DC; Kellock AJ; Marchon B; Kasai PH; Toney MF; York BR

author count

  • 13

citation count

  • 46

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

start page

  • 1895

end page

  • 1904

volume

  • 21

issue

  • 6