Unique precursor delivery and control afforded by low-pressure pulsed-CVD process with ultrasonic atomization Journal Article uri icon

Overview

publication date

  • August 1, 2001

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 12:43 PM

Full Author List

  • Krumdieck S; Sbaizero O; Raj R

author count

  • 3

citation count

  • 11

Other Profiles

International Standard Serial Number (ISSN)

  • 1155-4339

Additional Document Info

start page

  • 1161

end page

  • 1168

volume

  • 11

issue

  • PR3