Reliability of electrostatic MEMS: Charge accumulation in dielectric layer Journal Article uri icon

Overview

publication date

  • January 1, 2002

Date in CU Experts

  • September 6, 2013 12:40 PM

Full Author List

  • Chen XY; Ma ZC; Lee YC

author count

  • 3

citation count

  • 2

Other Profiles

International Standard Serial Number (ISSN)

  • 1565-1339

Electronic International Standard Serial Number (EISSN)

  • 2191-0294

Additional Document Info

start page

  • 665

end page

  • 670

volume

  • 3

issue

  • 3-4