Numerical study of the effects of reactor geometry on a chlorine plasma helicon etch reactor Journal Article uri icon

Overview

publication date

  • March 1, 1997

has restriction

  • closed

Date in CU Experts

  • August 13, 2019 1:04 AM

Full Author List

  • Font GI; Boyd ID

author count

  • 2

citation count

  • 14

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Additional Document Info

start page

  • 313

end page

  • 319

volume

  • 15

issue

  • 2