Effects of wall recombination on the etch rate and plasma composition of an etch reactor Journal Article uri icon

Overview

publication date

  • July 1, 1998

has restriction

  • closed

Date in CU Experts

  • August 13, 2019 1:01 AM

Full Author List

  • Font GI; Boyd ID; Balakrishnan J

author count

  • 3

citation count

  • 20

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Additional Document Info

start page

  • 2057

end page

  • 2064

volume

  • 16

issue

  • 4