Monte Carlo analysis of a hyperthermal silicon deposition process Journal Article uri icon

Overview

publication date

  • March 1, 1998

has restriction

  • closed

Date in CU Experts

  • August 13, 2019 1:00 AM

Full Author List

  • Chen G; Boyd ID; Roadman SE; Engstrom JR

author count

  • 4

citation count

  • 9

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Additional Document Info

start page

  • 689

end page

  • 699

volume

  • 16

issue

  • 2