Three dimensional modeling of silicon deposition process scale-up employing supersonic jets. II Journal Article uri icon

Overview

publication date

  • May 1, 1999

has restriction

  • closed

Date in CU Experts

  • August 13, 2019 12:54 PM

Full Author List

  • Chen G; Boyd ID; Engstrom JR

author count

  • 3

citation count

  • 3

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

start page

  • 978

end page

  • 985

volume

  • 17

issue

  • 3