In Situ Thermal Atomic Layer Etching for Sub-5 nm InGaAs Multigate MOSFETs Journal Article
Overview
publication date
- August 1, 2019
Date in CU Experts
- July 16, 2019 3:20 AM
Full Author List
- Lu W; Lee Y; Gertsch JC; Murdzek JA; Cavanagh AS; Kong L; del Alamo JA; George SM
author count
- 8
citation count
- 29
published in
Other Profiles
International Standard Serial Number (ISSN)
- 1530-6984
Electronic International Standard Serial Number (EISSN)
- 1530-6992
Digital Object Identifier (DOI)
Additional Document Info
start page
- 5159
end page
- 5166
volume
- 19
issue
- 8