In Situ Thermal Atomic Layer Etching for Sub-5 nm InGaAs Multigate MOSFETs Journal Article uri icon

Overview

publication date

  • August 1, 2019

Date in CU Experts

  • July 16, 2019 3:20 AM

Full Author List

  • Lu W; Lee Y; Gertsch JC; Murdzek JA; Cavanagh AS; Kong L; del Alamo JA; George SM

author count

  • 8

citation count

  • 29

Other Profiles

International Standard Serial Number (ISSN)

  • 1530-6984

Electronic International Standard Serial Number (EISSN)

  • 1530-6992

Additional Document Info

start page

  • 5159

end page

  • 5166

volume

  • 19

issue

  • 8