Thermal atomic layer etching of crystalline GaN using sequential exposures of XeF₂ and BCl₃ Journal Article

Overview

CU Boulder Authors

George, Steven

publication date

June 17, 2019

has restriction

closed

Date in CU Experts

July 16, 2019 2:28 AM

Full Author List

Johnson NR; Hite JK; Mastro MA; Eddy CR; George SM

author count

5

citation count

38

published in

Applied Physics Letters Journal

Other Profiles

International Standard Serial Number (ISSN)

0003-6951

Electronic International Standard Serial Number (EISSN)

1077-3118

Digital Object Identifier (DOI)

https://doi.org/10.1063/1.5095938

Additional Document Info

volume

114

issue

24

number

ARTN 243103