Thermal Atomic Layer Etching of Silicon Using O2, HF, and Al(CH3)3 as the Reactants Journal Article uri icon

Overview

publication date

  • December 11, 2018

has restriction

  • closed

Date in CU Experts

  • January 2, 2019 7:06 AM

Full Author List

  • Abdulagatov AI; George SM

author count

  • 2

citation count

  • 50

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 8465

end page

  • 8475

volume

  • 30

issue

  • 23