In-situ real-time ellipsometric investigations during the atomic layer deposition of ruthenium: A process development from [(ethylcyclopentadienyl)(pyrrolyl)ruthenium] and molecular oxygen Journal Article
Overview
publication date
- January 1, 2012
Date in CU Experts
- December 18, 2018 4:31 AM
Full Author List
- Knaut M; Junige M; Albert M; Bartha JW
author count
- 4
citation count
- 28
published in
Other Profiles
International Standard Serial Number (ISSN)
- 0734-2101
Electronic International Standard Serial Number (EISSN)
- 1520-8559
Digital Object Identifier (DOI)
Additional Document Info
volume
- 30
issue
- 1
number
- ARTN 01A151