Atomic layer deposition for high aspect ratio through silicon vias Journal Article uri icon

Overview

publication date

  • July 1, 2013

has restriction

  • closed

Date in CU Experts

  • December 18, 2018 4:31 AM

Full Author List

  • Knaut M; Junige M; Neumann V; Wojcik H; Henke T; Hossbach C; Hiess A; Albert M; Bartha JW

author count

  • 9

citation count

  • 30

Other Profiles

International Standard Serial Number (ISSN)

  • 0167-9317

Electronic International Standard Serial Number (EISSN)

  • 1873-5568

Additional Document Info

start page

  • 80

end page

  • 83

volume

  • 107