Area-selective atomic layer deposition of Ru on electron-beam-written Pt(C) patterns versus SiO2 substratum Journal Article uri icon

Overview

publication date

  • September 27, 2017

has restriction

  • closed

Date in CU Experts

  • December 18, 2018 4:31 AM

Full Author List

  • Junige M; Loeffler M; Geidel M; Albert M; Bartha JW; Zschech E; Rellinghaus B; van Dorp WF

author count

  • 8

citation count

  • 12

Other Profiles

International Standard Serial Number (ISSN)

  • 0957-4484

Electronic International Standard Serial Number (EISSN)

  • 1361-6528

Additional Document Info

volume

  • 28

issue

  • 39

number

  • ARTN 395301