Characterization and imaging of nanostructured materials using tabletop extreme ultraviolet light sources Conference Proceeding

Overview

CU Boulder Authors

publication date

February 26, 2018

has restriction

closed

Date in CU Experts

October 25, 2018 12:16 PM

Full Author List

Karl R; Knobloch J; Frazer T; Tanksalvala M; Porter C; Bevis C; Chao W; Mayor BA; Adams D; Mancini G

Full Editor List

Ukraintsev VA; Adan O

author count

13

citation count

0

published in

Proceedings of SPIE Journal

presented at event

Conference on Metrology, Inspection, and Process Control for Microlithography XXXII Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2297223

Additional Document Info

volume

10585