Electron-Enhanced Atomic Layer Deposition of Boron Nitride Thin Films at Room Temperature and 100 °C Journal Article uri icon

Overview

publication date

  • May 3, 2018

has restriction

  • closed

Date in CU Experts

  • May 25, 2018 2:43 AM

Full Author List

  • Sprenger JK; Sun H; Cavanagh AS; Roshko A; Blanchard PT; George SM

author count

  • 6

citation count

  • 30

Other Profiles

International Standard Serial Number (ISSN)

  • 1932-7447

Additional Document Info

start page

  • 9455

end page

  • 9464

volume

  • 122

issue

  • 17