High-fidelity modeling of MEMS resonators - Part II: Coupled beam-substrate dynamics and validation Journal Article uri icon

Overview

publication date

  • April 1, 2004

has restriction

  • closed

Date in CU Experts

  • September 3, 2013 2:35 AM

Full Author List

  • Park YH; Park KC

author count

  • 2

citation count

  • 22

Other Profiles

International Standard Serial Number (ISSN)

  • 1057-7157

Electronic International Standard Serial Number (EISSN)

  • 1941-0158

Additional Document Info

start page

  • 248

end page

  • 257

volume

  • 13

issue

  • 2