IEEE Journal of Microelectromechanical Systems Journal

Overview

publication venue for

• JMEMS Letters Direct Growth and Fabrication of Tungsten Coated GaN Nanowire Probes on Cantilevers for Scanning Probe Microscopy 2022
• Development of Ultra-Thin Thermal Ground Planes by Using Stainless-Steel Mesh as Wicking Structure 2016
• Mechanical Interfacing Using Suspended Ultrathin Films From ALD 2016
• Thin Flexible Thermal Ground Planes: Fabrication and Scaling Characterization 2015
• A Monolithic Polyimide Micro Cryogenic Cooler: Design, Fabrication, and Test 2014
The Development of Polymer-Based Planar Microcryogenic Coolers 2013
Interchangeable Stage and Probe Mechanisms for Microscale Universal Mechanical Tester 2012
The Development of Polymer-Based Flat Heat Pipes 2011
A Computational Design Methodology for Assembly and Actuation of Thin-Film Structures via Patterning of Eigenstrains 2009
Asymmetric dielectric trilayer cantilever probe for calorimetric high-frequency field imaging 2007
Mechanical effects of galvanic corrosion on structural polysilicon 2007
RF-MEMS capacitive switches fabricated using printed circuit processing techniques 2006
High-fidelity Modeling of MEMS resonators - Part 1: Anchor loss mechanisms through substrate 2004
High-fidelity modeling of MEMS resonators - Part II: Coupled beam-substrate dynamics and validation 2004
Nonlinear finite element analysis of a thin piezoelectric laminate for micro power generation 2003
Surface tension-powered self-assembly of micro structures - The state-of-the-art 2003
Deformation and structural stability of layered plate microstructures subjected to thermal loading 2002
... more

Research

keywords

• 0906 Electrical and Electronic Engineering, 0913 Mechanical Engineering, 0910 Manufacturing Engineering