Sub-wavelength transmission and reflection-mode tabletop imaging with 13nm illumination via ptychography CDI Conference Proceeding

Overview

CU Boulder Authors

publication date

February 27, 2017

has restriction

closed

Date in CU Experts

July 25, 2017 7:26 AM

Full Author List

Tanksalvala M; Porter CL; Gardner DF; Gerrity M; Mancini GF; Zhang X; Miley GP; Shanblatt ER; Galloway BR; Bevis CS

Full Editor List

Sanchez MI; Ukraintsev VA

author count

14

published in

Proceedings of SPIE Journal

presented at event

31st Conference on Metrology, Inspection, and Process Control for Microlithography Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2271386

International Standard Book Number (ISBN) 13

978-1-5106-0742-2

Additional Document Info

volume

10145