Thermal Atomic Layer Etching of ZnO by a "Conversion-Etch" Mechanism Using Sequential Exposures of Hydrogen Fluoride and Trimethylaluminum Journal Article uri icon

Overview

publication date

  • February 14, 2017

has restriction

  • closed

Date in CU Experts

  • April 4, 2017 9:57 AM

Full Author List

  • Zywotko DR; George SM

author count

  • 2

citation count

  • 73

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 1183

end page

  • 1191

volume

  • 29

issue

  • 3