Reliable characterization of materials and nanostructured systems << 50nm using coherent EUV beams Conference Proceeding

Overview

CU Boulder Authors

publication date

February 22, 2016

has restriction

closed

Date in CU Experts

July 13, 2016 4:08 AM

Full Author List

Hernandez-Charpak J; Frazer T; Knobloch J; Hoogeboom-Pot K; Nardi D; Chao W; Jiang L; Tripp M; King S; Kapteyn H

Full Editor List

Sanchez MI; Ukraintsev VA

author count

11

published in

Proceedings of SPIE Journal

presented at event

30th Conference on Metrology, Inspection, and Process Control for Microlithography Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2219434

Additional Document Info

volume

9778