Spectroscopic imaging of buried layers in 2+1D via tabletop ptychography with high-harmonic EUV illumination Conference Proceeding

Overview

CU Boulder Authors

publication date

February 22, 2016

has restriction

closed

Date in CU Experts

July 13, 2016 2:02 AM

Full Author List

Gardner DF; Porter CL; Shanblatt ER; Mancini GF; Karl R; Tanksalvala M; Bevis C; Kapteyn HC; Murnane MM; Adams DE

Full Editor List

Sanchez MI; Ukraintsev VA

author count

10

published in

Proceedings of SPIE Journal

presented at event

30th Conference on Metrology, Inspection, and Process Control for Microlithography Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2220368

Additional Document Info

volume

9778