ATOMIC LAYER DEPOSITED 1102 AS SACRIFICIAL LAYERS AND INTERNAL COATINGS FOR NANOSCALE GAPS Conference Proceeding

Overview

CU Boulder Authors

Lee, Y. C.

publication date

July 6, 2015

Date in CU Experts

May 3, 2016 5:15 AM

Full Author List

Liew L-A; Lin C-Y; Yersak A; Lewis R; Coolidge C; Lee YC

author count

6

presented at event

ASME International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK) Conference

Other Profiles

International Standard Book Number (ISBN) 13

978-0-7918-5690-1