OXIDATION-KINETICS OF SILICON SURFACES IN THE SUBMONOLAYER REGIME Journal Article uri icon

Overview

publication date

  • September 25, 1988

Date in CU Experts

  • December 9, 2015 12:04 PM

Full Author List

  • GUPTA P; MAK CH; COON PA; GEORGE SM

author count

  • 4

Other Profiles

International Standard Serial Number (ISSN)

  • 0065-7727

Additional Document Info

start page

  • 162

end page

  • COLL

volume

  • 196