DEPOSITION OF TITANIUM-OXIDE FILMS FROM METAL-ORGANIC PRECURSOR BY ELECTRON-CYCLOTRON-RESONANCE PLASMA-ASSISTED CHEMICAL-VAPOR-DEPOSITION Conference Proceeding uri icon

Overview

publication date

  • January 1, 1994

Date in CU Experts

  • December 3, 2015 1:29 AM

Full Author List

  • NAGAHORI A; RAJ R

author count

  • 2

citation count

  • 1

Other Profiles

International Standard Serial Number (ISSN)

  • 0272-9172

International Standard Book Number (ISBN) 10

  • 1-55899-234-0

Additional Document Info

start page

  • 117

end page

  • 122

volume

  • 335