Mechanism of Thermal Al2O3 Atomic Layer Etching Using Sequential Reactions with Sn(acac)(2) and HF Journal Article uri icon

Overview

publication date

  • May 26, 2015

has restriction

  • closed

Date in CU Experts

  • July 1, 2015 10:09 AM

Full Author List

  • Lee Y; DuMont JW; George SM

author count

  • 3

citation count

  • 56

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 3648

end page

  • 3657

volume

  • 27

issue

  • 10