Mechanical and thermal properties of nanomaterials at sub-50nm dimensions characterized using coherent EUV beams Conference Proceeding

Overview

CU Boulder Authors

publication date

February 23, 2015

has restriction

closed

Date in CU Experts

June 17, 2015 10:20 AM

Full Author List

Hoogeboom-Pot K; Hernandez-Charpak J; Frazer T; Gu X; Turgut E; Anderson E; Chao W; Shaw J; Yang R; Murnane M

Full Editor List

Cain JP; Sanchez MI

author count

12

citation count

2

published in

Proceedings of SPIE Journal

presented at event

29th Conference on Metrology, Inspection, and Process Control for Microlithography Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2085615

Additional Document Info

volume

9424