Atomic Layer Etching of Al2O3 Using Sequential, Self-Limiting Thermal Reactions with Sn(acac)2 and Hydrogen Fluoride Journal Article uri icon

Overview

publication date

  • February 1, 2015

has restriction

  • closed

Date in CU Experts

  • February 3, 2015 3:20 AM

Full Author List

  • Lee Y; George SM

author count

  • 2

citation count

  • 131

Other Profiles

International Standard Serial Number (ISSN)

  • 1936-0851

Electronic International Standard Serial Number (EISSN)

  • 1936-086X

Additional Document Info

start page

  • 2061

end page

  • 2070

volume

  • 9

issue

  • 2