Quantum chemical simulations of chemical mechanisms for atomic layer deposition Conference Proceeding
Overview
publication date
- September 8, 2013
Date in CU Experts
- May 28, 2014 6:26 AM
Full Author List
- Musgrave CB
author count
- 1
published in
presented at event
Other Profiles
International Standard Serial Number (ISSN)
- 0065-7727
Additional Document Info
volume
- 246