Quantum chemical simulations of chemical mechanisms for atomic layer deposition Conference Proceeding uri icon

Overview

publication date

  • September 8, 2013

Date in CU Experts

  • May 28, 2014 6:26 AM

Full Author List

  • Musgrave CB

author count

  • 1

Other Profiles

International Standard Serial Number (ISSN)

  • 0065-7727

Additional Document Info

volume

  • 246