A solder self-assembled large angular displacement torsional electrostatic micromirror Conference Proceeding

Overview

CU Boulder Authors

Bright, Victor Mark

publication date

January 20, 2002

has restriction

closed

Date in CU Experts

May 28, 2014 4:57 AM

Full Author List

McCarthy B; Bright VM; Neff JA

author count

3

citation count

5

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

presented at event

15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002) Conference

Other Profiles

International Standard Serial Number (ISSN)

1084-6999

Digital Object Identifier (DOI)

https://doi.org/10.1109/memsys.2002.984318

International Standard Book Number (ISBN) 10

0-7803-7185-2

Additional Document Info

start page

499

end page

502