Atomic layer deposited alumina for micromachined resonators Conference Proceeding

Overview

CU Boulder Authors

Bright, Victor Mark

publication date

January 13, 2008

Date in CU Experts

May 28, 2014 4:57 AM

Full Author List

Chang YJ; Cobry K; Bright VM

author count

3

citation count

4

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

presented at event

21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008) Conference

Other Profiles

International Standard Serial Number (ISSN)

1084-6999

International Standard Book Number (ISBN) 13

978-1-4244-1792-6

Additional Document Info

start page

387

end page

390