Thermally induced change in deformation of multimorph MEMS structures
Conference Proceeding
Overview
publication date
- October 22, 2001
has restriction
- closed
Date in CU Experts
- May 28, 2014 4:10 AM
Full Author List
- Miller DC; Dunn ML; Bright VM
Full Editor List
- Ramesham R
author count
- 3
citation count
- 6
published in
- Proceedings of SPIE Journal
presented at event
Other Profiles
International Standard Serial Number (ISSN)
- 0277-786X
Digital Object Identifier (DOI)
International Standard Book Number (ISBN) 10
- 0-8194-4286-0
Additional Document Info
start page
- 32
end page
- 44
volume
- 4558