Ab initio simulations of ALD mechanisms and the properties of ALD films Journal Article uri icon

Overview

publication date

  • March 25, 2012

Date in CU Experts

  • November 15, 2013 10:44 AM

Full Author List

  • Musgrave CB

author count

  • 1

Other Profiles

International Standard Serial Number (ISSN)

  • 0065-7727

Additional Document Info

volume

  • 243