REACTIVE ION ETCHING OF NIOBIUM Journal Article uri icon

Overview

publication date

  • January 1, 1981

has restriction

  • closed

Date in CU Experts

  • October 15, 2013 3:29 AM

Full Author List

  • FOXE TT; HUNT BD; ROGERS C; KLEINSASSER AW; BUHRMAN RA

author count

  • 5

citation count

  • 19

Other Profiles

International Standard Serial Number (ISSN)

  • 0022-5355

Additional Document Info

start page

  • 1394

end page

  • 1397

volume

  • 19

issue

  • 4