Examination of residual stress, morphology and mechanical properties of sputtered TiN films Journal Article uri icon

Overview

publication date

  • November 1, 1992

Date in CU Experts

  • May 6, 2026 4:02 AM

Full Author List

  • Höhl F; Stock H-R; Mayr P

author count

  • 3

Other Profiles

International Standard Serial Number (ISSN)

  • 0257-8972

Additional Document Info

start page

  • 160

end page

  • 166

volume

  • 54-55