Examination of residual stress, morphology and mechanical properties of sputtered TiN films
Journal Article
Overview
publication date
- November 1, 1992
Date in CU Experts
- May 6, 2026 4:02 AM
Full Author List
- Höhl F; Stock H-R; Mayr P
author count
- 3
published in
- Surface and Coatings Technology Journal
Other Profiles
International Standard Serial Number (ISSN)
- 0257-8972
Digital Object Identifier (DOI)
Additional Document Info
start page
- 160
end page
- 166
volume
- 54-55