Flow visualization studies for optimization of the growth of TiN by PACVD
Journal Article
Overview
publication date
- September 1, 1995
Date in CU Experts
- May 6, 2026 4:02 AM
Full Author List
- Crummenauer J; Stock H-R; Mayr P
author count
- 3
published in
- Surface and Coatings Technology Journal
Other Profiles
International Standard Serial Number (ISSN)
- 0257-8972
Digital Object Identifier (DOI)
Additional Document Info
start page
- 516
end page
- 521
volume
- 74-75