TiNx magnetron sputter coating controlled by an in situ eddy current sensor Journal Article uri icon

Overview

publication date

  • April 1, 1994

Date in CU Experts

  • May 6, 2026 4:02 AM

Full Author List

  • Klümper-Westkamp H; Mayr P

author count

  • 2

Other Profiles

International Standard Serial Number (ISSN)

  • 0040-6090

Additional Document Info

start page

  • 30

end page

  • 33

volume

  • 241

issue

  • 1-2