Soft X-ray Diffraction at 6.7 nm with a Tabletop High Harmonic Source Conference Proceeding

Overview

abstract

We report the development and use of a long-term stable tabletop coherent soft X-ray source for coherent diffraction measurements at 6.7 nm wavelength. This light source can enable widespread applications in scatterometry and imaging.

CU Boulder Authors

Kapteyn, Henry C

publication date

January 1, 2025

Date in CU Experts

January 24, 2026 2:46 AM

Full Author List

Hettel W; Jenkins N; Seifert G; Morrill D; Thurston J; Larsen R; Golba G; Carlson D; Kapteyn HC; Murnane MM

author count

11

presented at event

CLEO: Science and Innovations Conference

Other Profiles

Digital Object Identifier (DOI)

https://doi.org/10.1364/cleo_si.2025.pd101_6

Additional Document Info

start page

PD101_6

end page

PD101_6