Phase measurement of reflection of EUV multilayer mirror using EUV standing waves Conference Proceeding uri icon

Overview

publication date

  • June 1, 2004

has restriction

  • closed

Date in CU Experts

  • May 22, 2024 8:44 AM

Full Author List

  • Miyake A; Amemiya M; Masaki F; Watanabe Y

author count

  • 4

Other Profiles

International Standard Serial Number (ISSN)

  • 1071-1023

Additional Document Info

start page

  • 2970

end page

  • 2974

volume

  • 22

issue

  • 6