Analysis of carbon deposition on multilayer mirrors by using two different beamlines Conference Proceeding

Overview

CU Boulder Authors

Miyake, Akira

publication date

February 24, 2009

has restriction

closed

Date in CU Experts

May 22, 2024 8:44 AM

Full Author List

Nakayama T; Miyake A; Takase H; Terashima S; Sudo T; Watanabe Y; Fukuda Y

Full Editor List

Schellenberg FM; LaFontaine BM

author count

7

published in

Proceedings of SPIE Journal

presented at event

Conference on Alternative Lithographic Technologies Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.813587

Additional Document Info

volume

7271