DSMC-PIC simulation of a helicon plasma etch reactor and comparison with experiments Conference Proceeding

Overview

CU Boulder Authors

Boyd, Iain Douglas

publication date

May 4, 1997

Date in CU Experts

December 29, 2023 8:53 AM

Full Author List

Font GI; Boyd ID

Full Editor List

Meyyappan M; Economou DJ; Butler SW

author count

2

citation count

2

presented at event

2nd International Symposium on Control, Diagnostics and Modeling in Semiconductor Manufacturing, at the 191st Meeting of the Electrochemical-Society Conference

Other Profiles

International Standard Book Number (ISBN) 10

1-56677-136-6

Additional Document Info

start page

275

end page

282

volume

97

issue

9