ULSI technology and materials: Quantitative answers by combined mass spectrometry surface techniques Conference Proceeding

Overview

CU Boulder Authors

Fedrizzi, Mariangel

publication date

March 1, 1998

Date in CU Experts

September 13, 2023 12:57 PM

Full Author List

Bersani M; Fedrizzi M; Sbetti M; Anderle M

Full Editor List

Seiler DG; Diebold AC; Bullis WM; Shaffner TJ; McDonald R; Walters EJ

author count

4

citation count

9

published in

AIP Conference Proceedings Journal

presented at event

International Conference on Characterization and Metrology for ULSI Technology Conference

Other Profiles

International Standard Serial Number (ISSN)

0094-243X

International Standard Book Number (ISBN) 10

1-56396-867-3

Additional Document Info

start page

892

end page

896

volume

449