DEPOSITION OF PALLADIUM FILMS BY A NOVEL SUPERCRITICAL FLUID TRANSPORT-CHEMICAL DEPOSITION PROCESS Journal Article uri icon

Overview

publication date

  • November 1, 1991

has restriction

  • closed

Date in CU Experts

  • September 9, 2013 9:43 AM

Full Author List

  • HYBERTSON BM; HANSEN BN; BARKLEY RM; SIEVERS RE

author count

  • 4

citation count

  • 27

Other Profiles

International Standard Serial Number (ISSN)

  • 0025-5408

Additional Document Info

start page

  • 1127

end page

  • 1133

volume

  • 26

issue

  • 11