In‑situ real-time monitoring and control of kinetic processes in atomic layer depositions by spectroscopic ellipsometry with 1.25 Hz sampling rate Conference Proceeding uri icon


publication date

  • April 14, 2015

Date in CU Experts

  • December 7, 2022 2:14 AM

Full Author List

  • Junige M; Sharma V; Tanner R; Schmidt D; Pribil G; Albert M; Schubert M; Bartha JW

author count

  • 8

Other Profiles

Additional Document Info

start page

  • 186

end page

  • 188