Monitoring atomic layer deposition processes in situ and in real-time by spectroscopic ellipsometry
Conference Proceeding
Overview
publication date
- September 27, 2011
has restriction
- closed
Date in CU Experts
- December 7, 2022 1:53 AM
Full Author List
- Junige M; Geidel M; Knaut M; Albert M; Bartha JW
author count
- 5
presented at event
- 2011 Semiconductor Conference Dresden (SCD) Conference
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 1
end page
- 4