Testing and verification of micro-electro-mechanical systems (MEMS) micromirrors for high-performance scientific applications Conference Proceeding uri icon


publication date

  • August 1, 2021

has restriction

  • closed

Date in CU Experts

  • December 14, 2021 2:08 AM

Full Author List

  • Anderson NK; Fleming BT; Suresh A; Vorobiev D; Diaz A; France K; Schindhelm R; Hendrix A

Full Editor List

  • Siegmund OH

author count

  • 8

Other Profiles

International Standard Serial Number (ISSN)

  • 0277-786X

Electronic International Standard Serial Number (EISSN)

  • 1996-756X

International Standard Book Number (ISBN) 13

  • 978-1-5106-4480-9

Additional Document Info


  • 11821