Testing and verification of micro-electro-mechanical systems (MEMS) micromirrors for high-performance scientific applications Conference Proceeding

Overview

CU Boulder Authors

France, Kevin

publication date

August 1, 2021

has restriction

closed

Date in CU Experts

December 14, 2021 2:08 AM

Full Author List

Anderson NK; Fleming BT; Suresh A; Vorobiev D; Diaz A; France K; Schindhelm R; Hendrix A

Full Editor List

Siegmund OH

author count

8

published in

Proceedings of SPIE Journal

presented at event

Conference on UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XXII Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2593755

International Standard Book Number (ISBN) 13

978-1-5106-4480-9

Additional Document Info

volume

11821