In situ measurement of annealing-induced line shape evolution in nanoimprinted polymers using scatterometry Conference Proceeding

Overview

CU Boulder Authors

Ding, Yifu

publication date

February 24, 2009

has restriction

closed

Date in CU Experts

December 31, 2020 9:00 AM

Full Author List

Patrick HJ; Germer TA; Ding Y; Ro HW; Richter LJ; Soles CL

Full Editor List

Schellenberg FM; LaFontaine BM

author count

6

citation count

8

published in

Proceedings of SPIE Journal

presented at event

Conference on Alternative Lithographic Technologies Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.815360

Additional Document Info

volume

7271