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In situ evolution of stress gradients in Cu films induced by capping layers
Journal Article
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Additional Document Info
Overview
publication date
June 28, 2010
has restriction
closed
Date in CU Experts
November 5, 2020 2:39 AM
Full Author List
Murray CE; Besser PR; Witt C; Toney M
author count
4
citation count
4
published in
Applied Physics Letters
Journal
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International Standard Serial Number (ISSN)
0003-6951
Digital Object Identifier (DOI)
https://doi.org/10.1063/1.3458864
Additional Document Info
volume
96
issue
26
number
ARTN 261903