In situ evolution of stress gradients in Cu films induced by capping layers Journal Article uri icon

Overview

publication date

  • June 28, 2010

has restriction

  • closed

Date in CU Experts

  • November 5, 2020 2:39 AM

Full Author List

  • Murray CE; Besser PR; Witt C; Toney M

author count

  • 4

citation count

  • 4

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Additional Document Info

volume

  • 96

issue

  • 26

number

  • ARTN 261903