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Understanding stress gradients in microelectronic metallization
Conference Proceeding
Overview
Other Profiles
Additional Document Info
Overview
publication date
August 1, 2011
has restriction
closed
Date in CU Experts
November 5, 2020 2:39 AM
Full Author List
Murray CE; Ryan ET; Besser PR; Witt C; Jordan-Sweet JL; Toney MF
author count
6
citation count
3
published in
Powder Diffraction
Journal
presented at event
60th Denver X-ray Conference (DXC)
Conference
Other Profiles
International Standard Serial Number (ISSN)
0885-7156
Electronic International Standard Serial Number (EISSN)
1945-7413
Digital Object Identifier (DOI)
https://doi.org/10.1017/s0885715612000231
Additional Document Info
start page
92
end page
98
volume
27
issue
2